Sonkit metal ring seals offer several key advantages for semiconductor applications:

• High Resistance to Chemical and Temperature Changes:

The materials used in Sonkit seals withstand harsh chemical environments and extreme temperatures (-270°C to 300°C), essential for the demanding conditions within semiconductor equipment.

• Low Outgassing:

Sonkit seals have low outgassing rates, minimizing the release of contaminants into the vacuum environment, which is crucial for maintaining the high purity required in semiconductor processing.

• High Sealing Performance:

These seals are designed to provide a reliable and tight seal, preventing contaminants from entering the equipment and maintaining the necessary vacuum conditions.

• Ultra-Low Leakage Rate:

Sonkit seals are designed for ultra-low leakage, maintaining leakage rates below 1 × 10^-12 Pa·m³/s, crucial for UHV applications.

• Self-Adjusting Capability:

The spring-energized design compensates for material wear or temperature variations, preventing sealing failure and ensuring long-term reliability.

Ultra-high vacuum (UHV) applications in semiconductor manufacturing and scientific research present significant sealing challenges. These applications demand solutions capable of withstanding extreme conditions, including wide temperature ranges, variable pressures, and corrosive gases, while also adhering to strict purity and ultra-low leakage requirements.

Sonkit Industry Technology Co., Ltd. has developed a knife-edge, spring-energized metal C-ring specifically designed for these demanding UHV environments. This innovative seal replaces conventional stainless steel spring-energized metal C-rings, enabling effective compression and deformation with minimal bolt-tightening force. The unique knife-edge structure creates a true line seal, providing exceptional reliability in vacuum applications.

Key specifications of Sonkit's metal C-ring seals for UHV applications:

• Seal Type - Knife-edge, spring-energized metal C-ring
• Temperature Resistance - -270°C to 300°C
• Pressure Tolerance - Ultra-high vacuum (UHV) to 1 bar
• Medium - Corrosive gases, including fluorine, ammonia, and argon.

The Sonkit C-ring seal offers several key advantages:

• Lower Bolt Tightening Force:

This seal requires less bolt tightening force than traditional metal seals, making it a suitable replacement for rubber and non-metallic seals.

• Outstanding Performance in Extreme Environments:

It excels in high temperatures, high pressures, corrosive conditions, and ultra-low leakage applications.

• Enhanced Safety and Long-Term Stability:

The design ensures enhanced safety and long-term stability for scientific research, semiconductor, and high-tech vacuum applications.

• Ultra-Low Leakage:

The seal achieves a leakage rate of 1 × 10^-12 Pa·m³/s, exceeding industry benchmarks for UHV applications.